Global Extreme Ultraviolet Lithography Market Projected to Expand at 23.7% CAGR by 2029

November 14, 2025 by The Business Research Company

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How Much Larger Is The Extreme Ultraviolet Lithography Market Expected To Become By 2029 Compared With Its 2025 Level?

The realm of extreme ultraviolet lithography has seen a dramatic surge in market valuation lately, projecting an increase from $4.96 billion in the year 2024 to $6.02 billion by 2025, reflecting a robust compound annual growth rate (CAGR) of 21.3%; this historical upward trend is fundamentally driven by the escalating intricacy and shrinking dimensions of semiconductor devices, a rising imperative for fabrication processes that offer greater resolution and narrower line widths, substantial commitments to research and development within semiconductor fabrication methodologies, the migration toward cutting-edge manufacturing nodes such as 7nm, 5nm, and 3nm, and the continuous requirement to boost both output and efficiency within semiconductor fabrication facilities.

Anticipation surrounds the extreme ultraviolet lithography sector, with projections indicating substantial, rapid expansion in the upcoming years, reaching a valuation of $14.1 billion by 2029, propelled by a Compound Annual Growth Rate (CAGR) of 23.7%. This upward trajectory is fundamentally driven by the integration of euv lithography into the manufacturing processes for both memory and logic components, coupled with the expansion of semiconductor markets internationally, particularly in developing regions, while manufacturers intensify their focus on achieving high-volume output via euv processes and incorporating artificial intelligence and machine learning into their fabrication routines. Key developments shaping this period involve the utilization of multi-patterning methodologies alongside euv tools, the development of euv systems boasting a high numerical aperture (na), advancements in euv mask creation, the deployment of euv pellicles designed to safeguard masks, the introduction of sophisticated metrology and inspection systems tailored for euv applications, and the creation of euv machinery capable of substantially higher throughput for production environments.

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What Are The Key Drivers Of Growth In The Extreme Ultraviolet Lithography Market?

The rising need for mobile phones is projected to elevate the market for extreme ultraviolet lithography. Advanced technology known as extreme ultraviolet lithography (EUVL) serves to fabricate superior microprocessors, which are utilized in both personal computers and smartphones, surpassing the capabilities of conventional methods; this lithographic process facilitates the creation of intricate electronic components that are smaller, more economical to produce, and consume less energy. As an illustration, data from a March 2022 article published by Cybercrew—an association in the UK comprised of technology enthusiasts focused on mobile devices, computing, and gaming—indicated that approximately 87% of adults possessed smartphones by 2020, positioning the UK second globally with a smartphone penetration rate reaching 78.9%. Consequently, the growing consumer desire for more sophisticated smartphone models directly translates into an increased requirement for EUV lithography, empowering chip manufacturers to engineer circuits that offer greater speed, reduced size, and enhanced performance.

Which Key Segments Fueling The Extreme Ultraviolet Lithography Market?

The extreme ultraviolet lithography market covered in this report is segmented –

1) By Equipment: Light Source, Mirrors, Mask, Other Equipment

2) By Light Source: Laser-produced Plasma, Gas Discharge, Vacuum Sparks

3) By End User: Integrated Device Manufacturers (IDM), Foundry, Other End-Users

Subsegments:

1) By Light Source: Laser-Produced Plasma (LPP) Sources, Gas Discharge Plasma (GDP) Sources

2) By Mirrors: Reflective Mirrors, Multilayer Mirrors

3) By Mask: Masks For Patterning, Masks For Etching

4) By Other Equipment: Photomask Inspection Tools, Wafer Handling Equipment, Lithography Alignment Systems

What Trends Are Redefining The Extreme Ultraviolet Lithography Market Dynamics?

The substantial expenditure associated with extreme ultraviolet lithography apparatus has the potential to constrain the expansion of the extreme ultraviolet lithography sector. A lithography unit represents a crucial piece of equipment in the semiconductor fabrication process, with the most advanced machines necessary for producing leading-edge chips being exclusively supplied by the single entity, ASML. Given that an extreme ultraviolet lithography device comprises upwards of one hundred thousand individual components and carries a price tag approximating $120 million, the considerable cost of these units is anticipated to impede the market’s upward trajectory.

Which Global Market Leaders Are Shaping The Future Of The Extreme Ultraviolet Lithography Sector?

Major companies operating in the extreme ultraviolet lithography market include ASML Holding, Intel Corporation, Samsung Electronics, Taiwan Semiconductor Manufacturing Company (TSMC), Nikon Corporation, Canon Inc., Applied Materials Inc., Lam Research Corporation, KLA Corporation, Tokyo Electron Limited, Micron Technology Inc., SK Hynix Inc., IBM Corporation, Broadcom Inc., Qualcomm Inc., Infineon Technologies AG, Renesas Electronics Corporation, Advanced Micro Devices (AMD), Semiconductor Manufacturing International Corporation (SMIC), Aixtron SE, Rudolph Technologies, Onto Innovation Inc., Ultratech Inc., Veeco Instruments Inc.

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What Regional Growth Trends Are Shaping The Extreme Ultraviolet Lithography Market Outlook?

Asia-Pacific was the largest region in the extreme ultraviolet lithography market in 2024. North America was the second largest region in the electrical and electronics market during the forecast period. The regions covered in the extreme ultraviolet lithography market report include Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.

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